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Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond
Open Access
International Journal of Nanotechnology
17
, 583–606 (
2020
)
Authors
Dirk Jonker
Lucas Kooijman
Yasser Pordeli
Bernard van der Wel
Erwin J. W. Berenschot
Bjorn Borgelink
Hai Le The
Meint de Boer
Jan C. T. Eijkel
Ray Hueting
R. M. Tiggelaar
Arie van Houselt
Han J. G. E. Gardeniers
Niels R. Tas
BibTeΧ
@article{jonker2020wafer, title={Wafer-scale fabrication and modification of silicon nano-pillar arrays for nanoelectronics, nanofluidics and beyond}, author={Jonker, Dirk and Kooijman, Lucas and Pordeli, Yasser and Wel, Bernhard Van Der and Berenschot, Erwin and Borgelink, Bjorn and Le-The, Hai and Boer, Meint de and Eijkel, Jan and Hueting, Ray and others}, journal={International Journal of Nanotechnology}, volume={17}, number={7-10}, pages={583--606}, year={2020}, publisher={Inderscience Publishers (IEL)} }
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