Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning
M. Hauptmann, S. Brems, E. Camerotto, A.G. Zijlstra, G. Doumen, T. Bearda, P.W. Mertens, and W. Lauriks
Microelectronic Engineering 87, 1512 – 1515 (2010)BibTeΧ |
