Engulfment control of platinum nanoparticles into oxidized silicon substrates for fabrication of dense solid-state nanopore arrays[Open Access]
H. Le The, C. Tregouet, M. Kappl, M. Müller, K. Kirchhoff, D. Lohse, A. van den Berg, M. Odijk, and J.C.T. Eijkel
Nanotechnology 30, 065301 (2019)BibTeΧ |
