Impact of Acoustical Reflections on Megasonic Cleaning Performance

ECS Transactions 25, 287–294 (2009)

Authors

S. Brems
M. Hauptmann
Elisabeth Camerotto
Antoine Pacco
Sandip Halder
Aaldert Zijlstra
G. Doumen
T. Bearda
Paul W. Mertens

BibTeΧ

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Max Planck Gesellschaft

MCEC

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