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Impact of Acoustical Reflections on Megasonic Cleaning Performance
ECS Transactions
25
, 287–294 (
2009
)
Authors
S. Brems
M. Hauptmann
Elisabeth Camerotto
Antoine Pacco
Sandip Halder
Aaldert Zijlstra
G. Doumen
T. Bearda
Paul W. Mertens
BibTeΧ
@article{Brems25092009, author = {Brems, Steven and Hauptmann, Marc and Camerotto, Elisabeth and Pacco, Antoine and Halder, Sandip and Zijlstra, Aaldert and Doumen, Geert and Bearda, Twan and Mertens, Paul}, title = {Impact of Acoustical Reflections on Megasonic Cleaning Performance}, volume = {25}, number = {5}, pages = {287-294}, year = {2009}, doi = {10.1149/1.3202665}, URL = {http://ecst.ecsdl.org/content/25/5/287.abstract}, eprint = {http://ecst.ecsdl.org/content/25/5/287.full.pdf+html}, journal = {ECS Transactions} }
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