Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning

Microelectronic Engineering 87, 1512 – 1515 (2010)

Authors

M. Hauptmann
S. Brems
Elisabeth Camerotto
Aaldert Zijlstra
G. Doumen
T. Bearda
Paul W. Mertens
W. Lauriks

BibTeΧ

Original
Standardized
Standardized short

Max Planck Gesellschaft

MCEC

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