Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning

Microelectronic Engineering 87, 1512 – 1515 (2010)

Authors

M. Hauptmann
S. Brems
Elisabeth Camerotto
Aaldert Zijlstra
G. Doumen
T. Bearda
Paul W. Mertens
W. Lauriks

BibTeΧ

Original
Standardized
Standardized short

Rayleigh Benard convection conference 2018 rbc2018

Max Planck Gesellschaft

MCEC

Facebook
YouTube